{ "01_photo": { "title": "Photo PR Coat-Expose-Develop CD Window", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "pr_tone", "retained_pattern_source", "nominal_cd_nm", "exposure_dose_mj_cm2", "normalized_dose_pct", "focus_um", "coat_thickness_nm", "softbake_temp_c", "peb_temp_c", "develop_time_s", "developer_concentration_pct", "field_x", "field_y" ], "targets": [ "resist_line_cd_nm", "cdu_3sigma_nm", "ler_nm", "scum_probability", "pattern_collapse_probability", "defect_probability", "spec_pass" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "pr_tone", "retained_pattern_source", "nominal_cd_nm", "exposure_dose_mj_cm2", "normalized_dose_pct", "focus_um", "coat_thickness_nm", "softbake_temp_c", "peb_temp_c", "develop_time_s", "developer_concentration_pct", "field_x", "field_y" ], "targets": [ "resist_line_cd_nm", "cdu_3sigma_nm", "ler_nm", "scum_probability", "pattern_collapse_probability", "defect_probability", "spec_pass" ] } } }, "02_overlay": { "title": "Overlay Systematic Error", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "field_x", "field_y", "reticle_id", "align_quality", "ambient_temp_c" ], "targets": [ "overlay_x_nm", "overlay_y_nm", "residual_nm", "spec_pass" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "field_x", "field_y", "reticle_id", "align_quality", "ambient_temp_c" ], "targets": [ "overlay_x_nm", "overlay_y_nm", "residual_nm", "spec_pass" ] } } }, "03_dry_etch": { "title": "Dry Etch Endpoint", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "oes_peak_ratio", "endpoint_slope", "rf_source_w", "rf_bias_w", "pressure_mtorr", "gas_flow_sccm", "esc_temp_c", "chamber_age_runs" ], "targets": [ "endpoint_time_s", "cd_bias_nm", "selectivity", "overetch_risk" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "oes_peak_ratio", "endpoint_slope", "rf_source_w", "rf_bias_w", "pressure_mtorr", "gas_flow_sccm", "esc_temp_c", "chamber_age_runs" ], "targets": [ "endpoint_time_s", "cd_bias_nm", "selectivity", "overetch_risk" ] } } }, "04_har_etch": { "title": "HAR Etch Profile", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "aspect_ratio", "pattern_density", "gas_ratio", "rf_bias_w", "pressure_mtorr", "etch_time_s" ], "targets": [ "etch_depth_nm", "top_cd_nm", "bottom_cd_nm", "sidewall_angle_deg", "bowing_nm" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "aspect_ratio", "pattern_density", "gas_ratio", "rf_bias_w", "pressure_mtorr", "etch_time_s" ], "targets": [ "etch_depth_nm", "top_cd_nm", "bottom_cd_nm", "sidewall_angle_deg", "bowing_nm" ] } } }, "05_cmp": { "title": "CMP Multi-objective Optimization", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "down_force_psi", "platen_speed_rpm", "head_speed_rpm", "slurry_flow_ml_min", "pad_age_runs", "pattern_density" ], "targets": [ "removal_rate_proxy", "wiwnu_proxy", "dishing_nm", "erosion_nm", "yield_proxy" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "down_force_psi", "platen_speed_rpm", "head_speed_rpm", "slurry_flow_ml_min", "pad_age_runs", "pattern_density" ], "targets": [ "removal_rate_proxy", "wiwnu_proxy", "dishing_nm", "erosion_nm", "yield_proxy" ] } } }, "06_deposition_apc": { "title": "Deposition Run-to-Run APC", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "temp_c", "pressure_torr", "gas_flow_sccm", "cycles", "chamber_age_runs", "hours_since_maintenance" ], "targets": [ "thickness_nm", "uniformity_pct", "sheet_resistance_proxy", "next_run_cycle_correction" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "temp_c", "pressure_torr", "gas_flow_sccm", "cycles", "chamber_age_runs", "hours_since_maintenance" ], "targets": [ "thickness_nm", "uniformity_pct", "sheet_resistance_proxy", "next_run_cycle_correction" ] } } }, "07_fdc": { "title": "Equipment FDC", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "pressure_mean", "pressure_std", "temperature_c", "rf_power_w", "gas_flow_sccm", "motor_current_a", "vibration_rms", "endpoint_slope", "step_duration_s" ], "targets": [ "anomaly_type", "anomaly_score", "yield_loss_proxy" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "pressure_mean", "pressure_std", "temperature_c", "rf_power_w", "gas_flow_sccm", "motor_current_a", "vibration_rms", "endpoint_slope", "step_duration_s" ], "targets": [ "anomaly_type", "anomaly_score", "yield_loss_proxy" ] } } }, "08_dram": { "title": "DRAM Cell Transistor", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "gate_cd_nm", "eot_nm", "channel_dose_proxy", "anneal_temp_c", "contact_resistance_proxy" ], "targets": [ "vth_v", "ion_proxy", "ioff_proxy", "retention_risk", "spec_yield_pct" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "gate_cd_nm", "eot_nm", "channel_dose_proxy", "anneal_temp_c", "contact_resistance_proxy" ], "targets": [ "vth_v", "ion_proxy", "ioff_proxy", "retention_risk", "spec_yield_pct" ] } } }, "09_nand": { "title": "3D NAND Vth Window", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "layer", "pe_cycle", "program_pulse_v", "temperature_c", "retention_time_h", "state" ], "targets": [ "vth_mean_v", "vth_sigma_v", "read_window_v", "ber_proxy", "read_error" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "layer", "pe_cycle", "program_pulse_v", "temperature_c", "retention_time_h", "state" ], "targets": [ "vth_mean_v", "vth_sigma_v", "read_window_v", "ber_proxy", "read_error" ] } } }, "10_virtual_lot": { "title": "Photo-Etch-CMP Virtual Lot", "variants": { "A": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "photo_cd_nm", "overlay_nm", "etch_bias_nm", "etch_depth_nm", "cmp_dishing_nm", "film_thickness_nm" ], "targets": [ "final_cd_nm", "resistance_proxy", "defect_risk", "electrical_result", "yield_proxy" ] }, "B": { "student_train_rows": 805, "holdout_rows": 200, "features": [ "photo_cd_nm", "overlay_nm", "etch_bias_nm", "etch_depth_nm", "cmp_dishing_nm", "film_thickness_nm" ], "targets": [ "final_cd_nm", "resistance_proxy", "defect_risk", "electrical_result", "yield_proxy" ] } } } }